| Measuring Principle |
Pirani / inverted magnetron, both depending on gas type |
| Material In Contact With Vacuum |
Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic |
| Measurement Range |
1000 - 5 × 10⁻⁹ mbar (750 - 5 × 10⁻⁹ Torr), max. overpressure 4 bar abs. |
| Accuracy |
1000 - 10⁻³ mbar: < 30 % from reading
10⁻³ - 2 × 10⁻³ mbar: < 10 % from reading
2 × 10⁻³ - 1 × 10⁻⁸ mbar: < 25 % from reading
|
| Repeatability |
10⁻² - 1 × 10⁻² mbar: Approx. ±2% from reading
1 × 10⁻² - 1 × 10⁻⁸ mbar: Approx. ±7% from reading
|
| Response Time |
200 ms (1s for activating the cold cathode) |
| Cathode Voltage |
Max. 2.5 kV |
| Voltage Supply |
20 - 30 VDC |
| Electrical Connection |
VSM77D/DL, VSM79D/DL: SubD, 15pol., male, lockable
VSM77E, VSM79E: M12 circular connector, female, lockable,
1× A standard, 5pol., 2× D coded, 4pol.
|
| Power Consumption |
Max. 3 W, additionally 0.8 W for EtherCAT / relays / LCD |
| Operating Temperature |
+5...+60°C |
| Storage Temperature |
-40...+65°C |
| Maximum Bake Out Temperature |
160°C at flange (electronics detached) |
| Output Signal |
0 - 10 VDC, measuring range 1.819 - 8.6 VDC, log., 0.6 V/decade
Load resistor > 10kΩ (VSM77D/DL, VSM79D/DL) |
| Serial Interface |
RS485: 9.6 kBit/s to 115 kBit/s, address switch 1 - 16 |
| Switch Points |
2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA |
| Vacuum Connection |
DN 25 ISO-KF (VSM77), DN 40 CF-F (VSM79) |
| Protection Class |
IP54 (VSM77E, VSM79E), IP40 (VSM77D/DL, VSM79D/DL) |
| Weight |
Approx. 555 g |
